Hexafluoroethane
Encyclopedia
Hexafluoroethane is a fluorocarbon
counterpart to the hydrocarbon
ethane
. It is a non-flammable gas negligibly soluble in water
and slightly soluble in alcohol
.
has two allotropes. In the scientific literature, different phase transition
temperatures have been stated. The latest works assign it at 103 K (-170 °C). Below 103 K it has a slightly disordered structure, and over the transition point, it has a body centered cubic
structure.
Table of densities:
Vapor density is 4.823 (air = 1), specific gravity at 21 °C is 4.773 (air = 1) and specific volume at 21 °C is 0.1748 m³/kg.
in semiconductor
manufacturing. It can be used for selective etching of metal silicide
s and oxides versus their metal substrates and also for etching of silicon dioxide
over silicon
.
Together with trifluoromethane
it is used in refrigerant
s R508A (61%) and R508B (54%).
, with an atmospheric lifetime
of 10000 years and a global warming potential
(GWP) of 9200. Atmospheric concentration of tetrafluoroethane is 3 pptv (increase by 3 pptv since 1750). However, it has a strong absorption potential in the infrared part of the spectrum. Radiative forcing
is 0.001 W/m². Its ozone depletion potential
(ODP) is 0.
Hexafluoroethane is listed in IPCC list of greenhouse gases
.
Main industrial emissions of hexafluoroethane besides tetrafluoromethane
are produced during production of aluminium
using Hall-Héroult process
.
Fluorocarbon
Fluorocarbons, sometimes referred to as perfluorocarbons or PFCs, are organofluorine compounds that contain only carbon and fluorine bonded together in strong carbon–fluorine bonds. Fluoroalkanes that contain only single bonds are more chemically and thermally stable than alkanes...
counterpart to the hydrocarbon
Hydrocarbon
In organic chemistry, a hydrocarbon is an organic compound consisting entirely of hydrogen and carbon. Hydrocarbons from which one hydrogen atom has been removed are functional groups, called hydrocarbyls....
ethane
Ethane
Ethane is a chemical compound with chemical formula C2H6. It is the only two-carbon alkane that is an aliphatic hydrocarbon. At standard temperature and pressure, ethane is a colorless, odorless gas....
. It is a non-flammable gas negligibly soluble in water
Water
Water is a chemical substance with the chemical formula H2O. A water molecule contains one oxygen and two hydrogen atoms connected by covalent bonds. Water is a liquid at ambient conditions, but it often co-exists on Earth with its solid state, ice, and gaseous state . Water also exists in a...
and slightly soluble in alcohol
Alcohol
In chemistry, an alcohol is an organic compound in which the hydroxy functional group is bound to a carbon atom. In particular, this carbon center should be saturated, having single bonds to three other atoms....
.
Physical properties
Hexafluoroethane's solid phasePhase (matter)
In the physical sciences, a phase is a region of space , throughout which all physical properties of a material are essentially uniform. Examples of physical properties include density, index of refraction, and chemical composition...
has two allotropes. In the scientific literature, different phase transition
Phase transition
A phase transition is the transformation of a thermodynamic system from one phase or state of matter to another.A phase of a thermodynamic system and the states of matter have uniform physical properties....
temperatures have been stated. The latest works assign it at 103 K (-170 °C). Below 103 K it has a slightly disordered structure, and over the transition point, it has a body centered cubic
Cubic crystal system
In crystallography, the cubic crystal system is a crystal system where the unit cell is in the shape of a cube. This is one of the most common and simplest shapes found in crystals and minerals....
structure.
Table of densities:
State, temperature | Density (kg.m−3) |
---|---|
liquid, -78.2 °C | 1608 |
gas, -78.2 °C | 8.86 |
gas, 15 °C | 5.84 |
gas, 20.1 °C | 5.716 |
gas, 24 °C | 5.734 |
Vapor density is 4.823 (air = 1), specific gravity at 21 °C is 4.773 (air = 1) and specific volume at 21 °C is 0.1748 m³/kg.
Uses
Hexafluoroethane is used as a versatile etchantEtching (microfabrication)
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module, and every wafer undergoes many etching steps before it is complete....
in semiconductor
Semiconductor
A semiconductor is a material with electrical conductivity due to electron flow intermediate in magnitude between that of a conductor and an insulator. This means a conductivity roughly in the range of 103 to 10−8 siemens per centimeter...
manufacturing. It can be used for selective etching of metal silicide
Silicide
A silicide is a compound that has silicon with more electropositive elements.Silicon is more electropositive than carbon. Silicides are structurally closer to borides than to carbides....
s and oxides versus their metal substrates and also for etching of silicon dioxide
Silicon dioxide
The chemical compound silicon dioxide, also known as silica , is an oxide of silicon with the chemical formula '. It has been known for its hardness since antiquity...
over silicon
Silicon
Silicon is a chemical element with the symbol Si and atomic number 14. A tetravalent metalloid, it is less reactive than its chemical analog carbon, the nonmetal directly above it in the periodic table, but more reactive than germanium, the metalloid directly below it in the table...
.
Together with trifluoromethane
Fluoroform
Fluoroform is the chemical compound with the formula CHF3. It is one of the "haloforms", a class of compounds with the formula CHX3 . Fluoroform is used in diverse niche applications and is produced as a by-product of the manufacture of Teflon...
it is used in refrigerant
Refrigerant
A refrigerant is a substance used in a heat cycle usually including, for enhanced efficiency, a reversible phase change from a liquid to a gas. Traditionally, fluorocarbons, especially chlorofluorocarbons, were used as refrigerants, but they are being phased out because of their ozone depletion...
s R508A (61%) and R508B (54%).
Environmental effects
Due to the high energy of C-F bonds, it is very inert and thus acts as an extremely stable greenhouse gasGreenhouse gas
A greenhouse gas is a gas in an atmosphere that absorbs and emits radiation within the thermal infrared range. This process is the fundamental cause of the greenhouse effect. The primary greenhouse gases in the Earth's atmosphere are water vapor, carbon dioxide, methane, nitrous oxide, and ozone...
, with an atmospheric lifetime
Lifetime
Lifetime may refer to:*Life expectancy, the length of time a person is expected to remain alive*Mean lifetime, a certain number that characterizes the rate of reduction of a particle of an assembly...
of 10000 years and a global warming potential
Global warming potential
Global-warming potential is a relative measure of how much heat a greenhouse gas traps in the atmosphere. It compares the amount of heat trapped by a certain mass of the gas in question to the amount of heat trapped by a similar mass of carbon dioxide. A GWP is calculated over a specific time...
(GWP) of 9200. Atmospheric concentration of tetrafluoroethane is 3 pptv (increase by 3 pptv since 1750). However, it has a strong absorption potential in the infrared part of the spectrum. Radiative forcing
Radiative forcing
In climate science, radiative forcing is generally defined as the change in net irradiance between different layers of the atmosphere. Typically, radiative forcing is quantified at the tropopause in units of watts per square meter. A positive forcing tends to warm the system, while a negative...
is 0.001 W/m². Its ozone depletion potential
Ozone depletion potential
The ozone depletion potential of a chemical compound is the relative amount of degradation to the ozone layer it can cause, with trichlorofluoromethane being fixed at an ODP of 1.0. Chlorodifluoromethane , for example, has an ODP of 0.055...
(ODP) is 0.
Hexafluoroethane is listed in IPCC list of greenhouse gases
IPCC list of greenhouse gases
This is a list of LLGHG greenhouse gases as used by the IPCC TAR.-Gases relevant to radiative forcing only :The following table has its sources in Chapter 2, pg 141, Table 2.1...
.
Main industrial emissions of hexafluoroethane besides tetrafluoromethane
Tetrafluoromethane
Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon . It has a very high bond strength due to the nature of the carbon–fluorine bond. It can also be classified as a haloalkane or halomethane...
are produced during production of aluminium
Aluminium
Aluminium or aluminum is a silvery white member of the boron group of chemical elements. It has the symbol Al, and its atomic number is 13. It is not soluble in water under normal circumstances....
using Hall-Héroult process
Hall-Héroult process
The Hall–Héroult process is the major industrial process for the production of aluminium. It involves dissolving alumina in molten cryolite, and electrolysing the molten salt bath to obtain pure aluminium metal.-Process:...
.
Health risks
Due to its high relative density, it gathers in low-lying areas, and at high concentrations it can cause asphyxiation. Other health effects are similar to tetrafluoromethane.See also
- FluorocarbonFluorocarbonFluorocarbons, sometimes referred to as perfluorocarbons or PFCs, are organofluorine compounds that contain only carbon and fluorine bonded together in strong carbon–fluorine bonds. Fluoroalkanes that contain only single bonds are more chemically and thermally stable than alkanes...
, Perfluorocarbon - TetrafluoromethaneTetrafluoromethaneTetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon . It has a very high bond strength due to the nature of the carbon–fluorine bond. It can also be classified as a haloalkane or halomethane...
- OctafluoropropaneOctafluoropropaneOctafluoropropane is a fluorocarbon non-flammable greenhouse gas that can be produced either by electrochemical fluorination or by the Fowler process using cobalt fluoride.-Applications:...
- EthaneEthaneEthane is a chemical compound with chemical formula C2H6. It is the only two-carbon alkane that is an aliphatic hydrocarbon. At standard temperature and pressure, ethane is a colorless, odorless gas....
- Tetrafluoroethene
- HexachloroethaneHexachloroethaneHexachloroethane, also known as perchloroethanes , C2Cl6, is a colorless solid at room temperature which is used by the US Military in smoke compositions, e.g...
External links
- Purification process of hexafluoroethane
- Protocol for measurement of tetrafluoromethane and hexafluoroethane from primary aluminium production
- Ab initio vibrational analysis of hexafluoroethane C2F6
- Protocol for Measurement of Tetrafluoromethane (CF4) and Hexafluoroethane (C2F6) Emissions from Primary Aluminum Production
- Dynamics and structure of solid hexafluoroethane
- Thermochemistry data table at chemnet.ru