Chemical vapor deposition of diamond

Chemical vapor deposition of diamond or CVD is a method of producing synthetic diamond

Synthetic diamond

Synthetic diamond is diamond produced in a technological process; as opposed to natural diamond, which is created in geological processes. Synthetic diamond is also widely known as HPHT diamond or CVD diamond, denoting the production method, High-Pressure High-Temperature synthesis and Chemical...

by creating the circumstances necessary for carbon atoms in a gas to settle on a substrate in crystalline form.

Chemical vapor deposition

Chemical vapor deposition

Chemical vapor deposition is a chemical process used to produce high-purity, high-performance solid materials. The process is often used in the semiconductor industry to produce thin films. In a typical CVD process, the wafer is exposed to one or more volatile precursors, which react and/or...

of diamond has received a great deal of attention in the materials sciences because it allows many new applications of diamond that had previously been considered too difficult to make economical. CVD diamond growth typically occurs under low pressure

Pressure measurement

Many techniques have been developed for the measurement of pressure and vacuum. Instruments used to measure pressure are called pressure gauges or vacuum gauges....

(1–27 kPa

Pascal (unit)

The pascal is the SI derived unit of pressure, internal pressure, stress, Young's modulus and tensile strength, named after the French mathematician, physicist, inventor, writer, and philosopher Blaise Pascal. It is a measure of force per unit area, defined as one newton per square metre...

; 0.145–3.926 psi

Pounds per square inch

The pound per square inch or, more accurately, pound-force per square inch is a unit of pressure or of stress based on avoirdupois units...

; 7.5-203 Torr

Torr

The torr is a non-SI unit of pressure with the ratio of 760 to 1 standard atmosphere, chosen to be roughly equal to the fluid pressure exerted by a millimetre of mercury, i.e., a pressure of 1 torr is approximately equal to 1 mmHg...

) and involves feeding varying amounts of gases into a chamber, energizing them and providing conditions for diamond growth on the substrate. The gases always include a carbon source, and typically include hydrogen as well, though the amounts used vary greatly depending on the type of diamond being grown. Energy sources include hot filament, microwave

Microwave

Microwaves, a subset of radio waves, have wavelengths ranging from as long as one meter to as short as one millimeter, or equivalently, with frequencies between 300 MHz and 300 GHz. This broad definition includes both UHF and EHF , and various sources use different boundaries...

power, and arc discharges

Electric arc

An electric arc is an electrical breakdown of a gas which produces an ongoing plasma discharge, resulting from a current flowing through normally nonconductive media such as air. A synonym is arc discharge. An arc discharge is characterized by a lower voltage than a glow discharge, and relies on...

, among others. The energy source is intended to generate a plasma in which the gases are broken down and more complex chemistries occur. The actual chemical process for diamond growth is still under study and is complicated by the very wide variety of diamond growth processes used.

The advantages to CVD diamond growth include the ability to grow diamond over large areas, the ability to grow diamond on a substrate, and the control over the properties of the diamond produced. In the past, when high pressure high temperature (HPHT) techniques were used to produce diamond, the diamonds were typically very small free standing diamonds of varying sizes. With CVD diamond growth areas of greater than fifteen centimeters (six inches) diameter have been achieved and much larger areas are likely to be successfully coated with diamond in the future. Improving this ability is key to enabling several important applications.

The ability to grow diamond directly on a substrate is important because it allows the addition of many of diamond’s important qualities to other materials. Since diamond has the highest thermal conductivity

Thermal conductivity

In physics, thermal conductivity, k, is the property of a material's ability to conduct heat. It appears primarily in Fourier's Law for heat conduction....

of any bulk material, layering diamond onto high heat producing electronics (such as optics and transistors) allows the diamond to be used as a heat sink. Diamond films are being grown on valve rings, cutting tools, and other objects that benefit from diamond’s hardness and exceedingly low wear rate. In each case the diamond growth must be carefully done to achieve the necessary adhesion onto the substrate. Diamond's very high scratch resistance and thermal conductivity, combined with a lower coefficient of thermal expansion than Pyrex

Pyrex

Pyrex is a brand name for glassware, introduced by Corning Incorporated in 1915.Originally, Pyrex was made from borosilicate glass. In the 1940s the composition was changed for some products to tempered soda-lime glass, which is the most common form of glass used in glass bakeware in the US and has...

glass, a coefficient of friction close to that of Teflon (Polytetrafluoroethylene

Polytetrafluoroethylene

Polytetrafluoroethylene is a synthetic fluoropolymer of tetrafluoroethylene that finds numerous applications. PTFE is most well known by the DuPont brand name Teflon....

) and strong lipophilicity would make it a nearly ideal non-stick coating for cookware if large substrate areas could be coated economically.

The most important attribute of CVD diamond growth is the ability to control the properties of the diamond produced. In the area of diamond growth the word “diamond” is used as a description of any material primarily made up of sp3 bonded carbon, and there are many different types of diamond included in this. By regulating the processing parameters—especially the gases introduced, but also including the pressure the system is operated under, the temperature of the diamond, and the method of generating plasma—many different materials that can be considered diamond can be made. Single crystal diamond can be made containing various dopant

Dopant

A dopant, also called a doping agent, is a trace impurity element that is inserted into a substance in order to alter the electrical properties or the optical properties of the substance. In the case of crystalline substances, the atoms of the dopant very commonly take the place of elements that...

s. Polycrystalline diamond consisting of grain sizes from several nanometers to several micrometers

Micrometre

A micrometer , is by definition 1×10-6 of a meter .In plain English, it means one-millionth of a meter . Its unit symbol in the International System of Units is μm...

can be grown. Some polycrystalline diamond grains are surrounded by thin, non-diamond carbon, while others are not. These different factors affect the diamond’s hardness, smoothness, conductivity, optical properties and more.

Further reading