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Vapor deposition
Encyclopedia
Vapor deposition can refer to:
- Chemical vapor depositionChemical vapor depositionChemical vapor deposition is a chemical process used to produce high-purity, high-performance solid materials. The process is often used in the semiconductor industry to produce thin films. In a typical CVD process, the wafer is exposed to one or more volatile precursors, which react and/or...
- Physical vapor depositionPhysical vapor depositionPhysical vapor deposition is a variety of vacuum deposition and is a general term used to describe any of a variety of methods to deposit thin films by the condensation of a vaporized form of the desired film material onto various workpiece surfaces...