Megasonic cleaning
Encyclopedia
Megasonic Cleaning is a type of acoustic cleaning
, related to ultrasonic cleaning
. It is a gentler cleaning mechanism, less likely to cause damage, and is used in wafer, medical implant, and industrial part cleaning.
Similar to ultrasonic cleaning, megasonics utilizes a transducer
, usually composed of piezoelectric crystals to create megasonic energy. Megasonic energy is of a higher frequency (800–2000 kHz) than typical ultrasonic cleaners (<100 kHz). As a result, the cavitation
that occurs is gentler and on a much smaller scale. Megasonics are currently used mainly in the silicon industry.
Megasonics cleaning compared to ultrasonic cleaning -
The difference between ultrasonic cleaning and megasonics cleaning lies in the frequency that is used to generate the acoustic waves. Ultrasonic cleaning uses lower frequencies; it produces random cavitation. Megasonics cleaning uses higher frequencies at 1000 kHz; it produces controlled cavitation.
An important distinction between the two methods is that the higher megasonic frequencies do not cause the violent cavitation effects found with ultrasonic frequencies. This significantly reduces or eliminates cavitation erosion and the likelihood of surface damage to the product being cleaned. Parts that would be damaged by ultrasonic frequencies or cavitation effects can often be cleaned without damage in a megasonic bath using the same solution.
With ultrasonics, cavitation occurs throughout the tank, and all sides of submerged parts are cleaned. With megasonics, only the side of the part that is facing the transducer(s) is cleaned.
Acoustic cleaning
Acoustic cleaning is used wherever there is a build-up of dry materials and particulates which need to be cleaned regularly to ensure maximum efficiency, and minimize maintenance and down time...
, related to ultrasonic cleaning
Ultrasonic cleaning
thumb|300px|Ultrasonic cleaner showing the removable basket in place, and a closeup of the light and timerAn ultrasonic cleaner is a cleaning device that uses ultrasound and an appropriate cleaning solvent to clean delicate items...
. It is a gentler cleaning mechanism, less likely to cause damage, and is used in wafer, medical implant, and industrial part cleaning.
Similar to ultrasonic cleaning, megasonics utilizes a transducer
Transducer
A transducer is a device that converts one type of energy to another. Energy types include electrical, mechanical, electromagnetic , chemical, acoustic or thermal energy. While the term transducer commonly implies the use of a sensor/detector, any device which converts energy can be considered a...
, usually composed of piezoelectric crystals to create megasonic energy. Megasonic energy is of a higher frequency (800–2000 kHz) than typical ultrasonic cleaners (<100 kHz). As a result, the cavitation
Cavitation
Cavitation is the formation and then immediate implosion of cavities in a liquidi.e. small liquid-free zones that are the consequence of forces acting upon the liquid...
that occurs is gentler and on a much smaller scale. Megasonics are currently used mainly in the silicon industry.
Megasonics cleaning compared to ultrasonic cleaning -
The difference between ultrasonic cleaning and megasonics cleaning lies in the frequency that is used to generate the acoustic waves. Ultrasonic cleaning uses lower frequencies; it produces random cavitation. Megasonics cleaning uses higher frequencies at 1000 kHz; it produces controlled cavitation.
An important distinction between the two methods is that the higher megasonic frequencies do not cause the violent cavitation effects found with ultrasonic frequencies. This significantly reduces or eliminates cavitation erosion and the likelihood of surface damage to the product being cleaned. Parts that would be damaged by ultrasonic frequencies or cavitation effects can often be cleaned without damage in a megasonic bath using the same solution.
With ultrasonics, cavitation occurs throughout the tank, and all sides of submerged parts are cleaned. With megasonics, only the side of the part that is facing the transducer(s) is cleaned.