In microtechnology

Microtechnology

Microtechnology is technology with features near one micrometre .In the 1960s, scientists learned that by arraying large numbers of microscopic transistors on a single chip, microelectronic circuits could be built that dramatically improved performance, functionality, and reliability, all while...

, mask inspection or photomask inspection is an operation of checking the correctness of the fabricated photomask

Photomask

A photomask is an opaque plate with holes or transparencies that allow light to shine through in a defined pattern. They are commonly used in photolithography.-Overview:...

s, used, e.g., for semiconductor device fabrication.

Modern technologies for locating defects in photomasks are automated systems that involve scanning electron microscopy and other advanced tools.

Mask data inspection

The term "mask inspection" may also informally refer to mask data inspection step performed before actual writing the real mask.