MEMS sensor generations
Encyclopedia
MEMS sensor generations represent the progress made in micro sensor
technology and can be categorized as follows:
1st Generation :MEMS
sensor element mostly based on a silicon
structure, sometimes combined with analog amplification on a micro chip
..
2nd Generation:MEMS sensor element combined with analog amplification and analog-to-digital converter
on one micro chip.
3rd Generation :Fusion of the sensor element with analog amplification, analog-to-digital converter and digital
intelligence for linearization and temperature compensation on the same micro chip.
4th Generation :Memory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation.
Sensor
A sensor is a device that measures a physical quantity and converts it into a signal which can be read by an observer or by an instrument. For example, a mercury-in-glass thermometer converts the measured temperature into expansion and contraction of a liquid which can be read on a calibrated...
technology and can be categorized as follows:
1st Generation :MEMS
Microelectromechanical systems
Microelectromechanical systems is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems and nanotechnology...
sensor element mostly based on a silicon
Silicon
Silicon is a chemical element with the symbol Si and atomic number 14. A tetravalent metalloid, it is less reactive than its chemical analog carbon, the nonmetal directly above it in the periodic table, but more reactive than germanium, the metalloid directly below it in the table...
structure, sometimes combined with analog amplification on a micro chip
Integrated circuit
An integrated circuit or monolithic integrated circuit is an electronic circuit manufactured by the patterned diffusion of trace elements into the surface of a thin substrate of semiconductor material...
..
2nd Generation:MEMS sensor element combined with analog amplification and analog-to-digital converter
Analog-to-digital converter
An analog-to-digital converter is a device that converts a continuous quantity to a discrete time digital representation. An ADC may also provide an isolated measurement...
on one micro chip.
3rd Generation :Fusion of the sensor element with analog amplification, analog-to-digital converter and digital
Digital
A digital system is a data technology that uses discrete values. By contrast, non-digital systems use a continuous range of values to represent information...
intelligence for linearization and temperature compensation on the same micro chip.
4th Generation :Memory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation.