Borophosphosilicate glass
Encyclopedia
Borophosphosilicate glass, commonly known as BPSG, is a type of silicate glass that includes additives of both boron
and phosphorus
. Silicate glasses such as PSG
and borophosphosilicate glass are commonly used in semiconductor device fabrication for intermetal layers, i.e., insulating layers deposited between succeedingly higher metal or conducting layers.
BPSG has been implicated in increasing a device's susceptibility to soft error
s since the Boron-10 isotope is good at capturing thermal neutrons from cosmic radiation. It then undergoes fission
producing a gamma ray
, an alpha particle
, and a lithium
ion. These products may then dump charge into nearby structures, causing data loss (bit flipping, or single event upset
).
In critical designs, depleted boron consisting almost entirely of Boron-11 is used to avoid this effect as a radiation hardening
measure. Boron-11 is a by-product of the nuclear industry
.
Boron
Boron is the chemical element with atomic number 5 and the chemical symbol B. Boron is a metalloid. Because boron is not produced by stellar nucleosynthesis, it is a low-abundance element in both the solar system and the Earth's crust. However, boron is concentrated on Earth by the...
and phosphorus
Phosphorus
Phosphorus is the chemical element that has the symbol P and atomic number 15. A multivalent nonmetal of the nitrogen group, phosphorus as a mineral is almost always present in its maximally oxidized state, as inorganic phosphate rocks...
. Silicate glasses such as PSG
Phosphosilicate glass
Phosphosilicate glass, commonly referred to by the acronym PSG, is a silicate glass commonly used in semiconductor device fabrication for intermetal layers, i.e., insulating layers deposited between succeedingly higher metal or conducting layers...
and borophosphosilicate glass are commonly used in semiconductor device fabrication for intermetal layers, i.e., insulating layers deposited between succeedingly higher metal or conducting layers.
BPSG has been implicated in increasing a device's susceptibility to soft error
Soft error
In electronics and computing, a soft error is an error in a signal or datum which is wrong. Errors may be caused by a defect, usually understood either to be a mistake in design or construction, or a broken component. A soft error is also a signal or datum which is wrong, but is not assumed to...
s since the Boron-10 isotope is good at capturing thermal neutrons from cosmic radiation. It then undergoes fission
Nuclear fission
In nuclear physics and nuclear chemistry, nuclear fission is a nuclear reaction in which the nucleus of an atom splits into smaller parts , often producing free neutrons and photons , and releasing a tremendous amount of energy...
producing a gamma ray
Gamma ray
Gamma radiation, also known as gamma rays or hyphenated as gamma-rays and denoted as γ, is electromagnetic radiation of high frequency . Gamma rays are usually naturally produced on Earth by decay of high energy states in atomic nuclei...
, an alpha particle
Alpha particle
Alpha particles consist of two protons and two neutrons bound together into a particle identical to a helium nucleus, which is classically produced in the process of alpha decay, but may be produced also in other ways and given the same name...
, and a lithium
Lithium
Lithium is a soft, silver-white metal that belongs to the alkali metal group of chemical elements. It is represented by the symbol Li, and it has the atomic number 3. Under standard conditions it is the lightest metal and the least dense solid element. Like all alkali metals, lithium is highly...
ion. These products may then dump charge into nearby structures, causing data loss (bit flipping, or single event upset
Single event upset
A single event upset is a change of state caused by ions or electro-magnetic radiation striking a sensitive node in a micro-electronic device, such as in a microprocessor, semiconductor memory, or power transistors. The state change is a result of the free charge created by ionization in or close...
).
In critical designs, depleted boron consisting almost entirely of Boron-11 is used to avoid this effect as a radiation hardening
Radiation hardening
Radiation hardening is a method of designing and testing electronic components and systems to make them resistant to damage or malfunctions caused by ionizing radiation , such as would be encountered in outer space, high-altitude flight, around nuclear reactors, particle accelerators, or during...
measure. Boron-11 is a by-product of the nuclear industry
Nuclear power
Nuclear power is the use of sustained nuclear fission to generate heat and electricity. Nuclear power plants provide about 6% of the world's energy and 13–14% of the world's electricity, with the U.S., France, and Japan together accounting for about 50% of nuclear generated electricity...
.