PROLITH
Encyclopedia
PROLITH is a computer simulator
modeling the optical and chemical aspects of photolithography
. Chris Mack started developing PROLITH after he began working in the field of photolithography at the NSA
in 1983.
PROLITH was first developed on an IBM PC
. The models implemented by the software were based on the work done by Rick Dill at IBM
and Andy Neureuther at UC Berkley, together with Chris Mack's own contributions such as the Mack model.
Originally PROLITH was given away for free, while NSA was paying Chris Mack's salary. In 1990 he founded FINLE Technologies to commercialize PROLITH. The first commercial version of the software, named PROLITH/2, was released in June of that year. PROLITH was made easier to use and it grew to include many more aspects of lithography simulation.
FINLE Technologies was purchased in February 2000 by KLA-Tencor, which now markets PROLITH.
Computer simulation
A computer simulation, a computer model, or a computational model is a computer program, or network of computers, that attempts to simulate an abstract model of a particular system...
modeling the optical and chemical aspects of photolithography
Photolithography
Photolithography is a process used in microfabrication to selectively remove parts of a thin film or the bulk of a substrate. It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical "photoresist", or simply "resist," on the substrate...
. Chris Mack started developing PROLITH after he began working in the field of photolithography at the NSA
National Security Agency
The National Security Agency/Central Security Service is a cryptologic intelligence agency of the United States Department of Defense responsible for the collection and analysis of foreign communications and foreign signals intelligence, as well as protecting U.S...
in 1983.
PROLITH was first developed on an IBM PC
IBM PC
The IBM Personal Computer, commonly known as the IBM PC, is the original version and progenitor of the IBM PC compatible hardware platform. It is IBM model number 5150, and was introduced on August 12, 1981...
. The models implemented by the software were based on the work done by Rick Dill at IBM
IBM
International Business Machines Corporation or IBM is an American multinational technology and consulting corporation headquartered in Armonk, New York, United States. IBM manufactures and sells computer hardware and software, and it offers infrastructure, hosting and consulting services in areas...
and Andy Neureuther at UC Berkley, together with Chris Mack's own contributions such as the Mack model.
Originally PROLITH was given away for free, while NSA was paying Chris Mack's salary. In 1990 he founded FINLE Technologies to commercialize PROLITH. The first commercial version of the software, named PROLITH/2, was released in June of that year. PROLITH was made easier to use and it grew to include many more aspects of lithography simulation.
FINLE Technologies was purchased in February 2000 by KLA-Tencor, which now markets PROLITH.