I am sputtering ITO on PET film at 3.5 Mill Torr. For some reasons the sheet resistance is low <50/square, but the film is really dark(trans <30%). Could it be due to formations of nodules on the ITO target? Please comment...

Indium tin oxide

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zoweil

I am sputtering ITO on PET film at 3.5 Mill Torr. For some reasons the sheet resistance is low <50/square, but the film is really dark(trans <30%). Could it be due to formations of nodules on the ITO target?
Please comment

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