Are there any n-type doping materials which implants on silicon layer can be used as a stop etch layer ? Just like boron implantation on a layer act as an etch stop.

Microfabrication

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kj4g09

Are there any n-type doping materials which implants on silicon layer can be used as a stop etch layer ? Just like boron implantation on a layer act as an etch stop.

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